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Emerson Tescom 64-3600 Series Highly Sensitive Pressure Regulator, Made with durable 316 Stainless Steel

Brand :
Tescom

64-3600 Series ultra high purity, highly sensitive pressure reducing regulator offers a low droop, tied diaphragm design, 10 Ra / 0.25 micrometer surface finish with available Hastelloy trim. Inlet pressures are 600 or 3500 psig / 41.4 or 241 bar with outlet pressure up to 150 psig / 10.3 bar. Ideal for use in 1/4" point-of-use, gas cabinets, semiconductor manufacturing and valve manifold boxes.

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Description

Emerson TESCOM 64-3600 Series ultra high purity, highly sensitive pressure reducing regulator offers a low droop, tied diaphragm design, 10 Ra / 0.25 micrometer surface finish with available Hastelloy trim. Inlet pressures are 600 or 3500 psig / 41.4 or 241 bar with outlet pressure up to 150 psig / 10.3 bar. Ideal for use in 1/4" point-of-use, gas cabinets, semiconductor manufacturing and valve manifold boxes. The Emerson TESCOM 64-3600 Series Highly Sensitive Pressure Regulator is engineered to provide outstanding performance and reliability. It is ideal for a wide range of applications, offering exceptional durability and efficiency. Key specifications and features make it a top choice for professionals worldwide.

Features

• 10 Ra microinch / 0.25 micrometer internal surface finishes • Metal-to-metal seal (diaphragm to body seal for high leak integrity) • Full internal electropolish is available • Designed to reduce pressure fluctuations in semiconductor gas systems • Meets the stringent semiconductor requirements of both point-of-use and • cylinder applications

Downloads

TESCOM_ 64_3600 Series Highly Sensitive Pressure Regulator_datasheet_2.pdf

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Specifications

Body Material
316L Stainless Steel Electropolish or 316L VAR Stainless Steel Electropolish
Diaphragm
Hastelloy
Valve Seat
PCTFE, Teflon PFA or Vespel
Stem & Valve Spring
316 Stainless Steel
Remaining Parts
316 Stainless Steel or Hastelloy
Operating Temperature
Teflon PFA Seat: -40 to 160°F / -40 to 71°CVespel Seat: -40 to 350°F / -40 to 177°CPCTFE Seat: -40 to 140°F / -40 to 60°C
Port Size & Type
1/4, 1/2 Male Swivel, Female Swivel, Male Fixed, HPIC1/4 Tube Stubs
Flow Capacity
Cv = 0.15 or 0.06
Weight
2 lbs / 0.9 kg
Additional Information
For custom modifications or a complete system solution, please contact your local sales office.

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